1. Institute of Semiconductor Manufacturing Research, the Institute of Microelectronics, and the State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen, China
2. Institute of Semiconductor Manufacturing Research, Shenzhen University, Shenzhen, China
3. State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen, China
4. Institute of Semiconductor Manufacturing Research and the Institute of Microelectronics, Shenzhen University, Shenzhen, China