A Broadband and Low Damping Piezoelectric MEMS Vibration Platform for 6-DOF Inertial Motion-Reference-Cited by-同舟云学术

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A Broadband and Low Damping Piezoelectric MEMS Vibration Platform for 6-DOF Inertial Motion

Published:2023-09-15 Issue:18 Volume:23 Page:21327-21334
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Xing Yunhong¹^ORCID,Yu Ting¹,Yan Haixia²,Yue Chenxi¹^ORCID,Zhao Jiabo¹,Hu Mengyi¹,Zhong Yuxin¹,Liu Chaoran¹^ORCID,Yang Weihuang¹^ORCID,Dong Linxi¹^ORCID

Affiliation:

1. Smart Microsensors and Microsystems Engineering Research Center, Ministry of Education, College of Electronics and Information, Hangzhou Dianzi University, Hangzhou, China

2. School of Information Engineering, Hangzhou Dianzi University, Hangzhou, China

Funder

National Natural Science Foundation of China

Zhejiang Provincial Talent Project

National Key Research and Development Plan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/10251409/10209566.pdf?arnumber=10209566

Reference28 articles.

1. Calibration Method of Accelerometer Based on Rotation Principle Using Double Turntable Centrifuge

2. Calibration of cross quadratic term of gyro accelerometer on centrifuge and error analysis

3. A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence Tomography

4. Symmetric calibration method of pendulous Integrating Gyroscopic accelerometer on centrifuge

5. Analysis and calibration of the mounting errors between inertial measurement unit and turntable in dual-axis rotational inertial navigation system

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