Improved Dynamic Range of Microwave Power Sensor by MEMS Cantilever Beam
Author:
Funder
National Natural Science Foundation of China
Six Talent Peaks Project in Jiangsu Province
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/84/8124141/08057585.pdf?arnumber=8057585
Reference9 articles.
1. A capacitive RF power sensor based on MEMS technology
2. New Thermocouple-Based Microwave/Millimeter-Wave Power Sensor MMIC Techniques in GaAs
3. A cascade RF power sensor based on GaAs MMIC for improved dynamic range application
4. Inline capacitive RF power sensor based on floating MEMS beam for GaAs MMIC applications
5. The High Power up to 1 W Characteristics of the Capacitive Microwave Power Sensor With Grounded MEMS Beam
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