Thin-Film Piezoelectric Micromachined Ultrasound Transducers in Biomedical Applications: A Review-Reference-Cited by-同舟云学术

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Thin-Film Piezoelectric Micromachined Ultrasound Transducers in Biomedical Applications: A Review

Published:2024-06 Issue:6 Volume:71 Page:622-637
ISSN:0885-3010
Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
language:
Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Wong Sean J. Z.¹^ORCID,Roy Kaustav²^ORCID,Lee Chengkuo²^ORCID,Zhu Yao³^ORCID

Affiliation:

1. Department of Integrative Sciences and Engineering Programme, National University of Singapore, Queenstown, Singapore

2. Electrical and Computer Engineering Department, National University of Singapore, Queenstown, Singapore

3. Institute of Microelectronics, Agency for Science, Technology, and Research, Singapore, Singapore

Funder

Science and Engineering Research Council of A.STAR, Singapore

piezoelectric micromachined ultrasound transducers (PMUT) devices

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/58/10552443/10504863.pdf?arnumber=10504863

Reference128 articles.

1. 3-D Ultrasonic Fingerprint Sensor-on-a-Chip

2. Broadband ring-shaped PMUTS based on an acoustically induced resonance

3. Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

4. Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

5. {1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

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