An Influence of an Electrode Configuration on Electrical Parameters of a Microelectronic Bulk Acoustic Wave Resonator with a Bragg Reflector-Reference-Cited by-同舟云学术

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An Influence of an Electrode Configuration on Electrical Parameters of a Microelectronic Bulk Acoustic Wave Resonator with a Bragg Reflector

Published:2024-06-03 Issue: Volume: Page:1-4
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Container-title:2024 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF)
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Author:

Zhilin N. M.¹,Ulaeva T. N.¹,Chirikov N. A.¹,Kozlov A. G.²

Affiliation:

1. (Institute of Radiophysics and Physical Electronics),Omsk Scientific Center SB RAS,Omsk,Russia

2. Omsk State Technical University,Omsk,Russia

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10564567/10564568/10564659.pdf?arnumber=10564659

Reference8 articles.

1. Materials, Design, and Characteristics of Bulk Acoustic Wave Resonator: A Review

2. Mechanically Driven Solidly Mounted Resonator‐Based Nanoelectromechanical Systems Magnetoelectric Antennas

3. The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

4. A method for extracting sole mechanical properties of Bragg reflector by GHz ultrasonic pulse-echo technique

5. Fabrication of a 3.5-GHz Solidly Mounted Resonator by Using an AlScN Piezoelectric Thin Film

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