Nanogap CMOS-MEMS Pirani Gauge Based on Titanium-Nitride Heating Element for Broad-Range Vacuum Characterization-Reference-Cited by-同舟云学术

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Nanogap CMOS-MEMS Pirani Gauge Based on Titanium-Nitride Heating Element for Broad-Range Vacuum Characterization

Published:2024-02 Issue:2 Volume:71 Page:1214-1219
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Garg Manu¹^ORCID,Singh Pushpapraj²^ORCID,Chiu Yi³^ORCID

Affiliation:

1. International College of Semiconductor Technology (ICST), National Yang Ming Chiao Tung University, Hsinchu, Taiwan

2. Centre for Applied Research in Electronics (CARE), Indian Institute of Technology Delhi (IITD), New Delhi, India

3. Department of Electronics and Electrical Engineering and the International College of Semiconductor Technology (ICST), National Yang Ming Chiao Tung University, Hsinchu, Taiwan

Funder

National Science and Technology Council (NSTC), Taiwan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/16/10413236/10364975.pdf?arnumber=10364975

Reference30 articles.

1. A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer

2. MEMS Using CMOS Wafer

3. Recent Trends in CMOS-MEMS Sensors

4. CMOS-MEMS Technologies for the Applications of Environment Sensors and Environment Sensing Hubs

5. CMOS–MEMS resonators: From devices to applications

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