Parametric Resonance in Electrostatically Actuated Micromirrors
Author:
Funder
Lab4MEMSII
ENIAC Joint Undertaking
ENIAC
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/41/7812803/07583716.pdf?arnumber=7583716
Reference25 articles.
1. Five parametric resonances in a microelectromechanical system
2. Mechanical parametric amplification and thermomechanical noise squeezing
3. Optically pumped parametric amplification for micromechanical oscillators
4. Parametric amplification in a torsional microresonator
5. Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor
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