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Capacitive micromachined ultrasonic transducers with piston-shaped membranes: fabrication and experimental characterization

  • Published:2009-01 Issue:1 Volume:56 Page:136-145
  • ISSN:0885-3010
  • Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
  • language:
  • Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Huang Yongli,Zhuang Xuefeng,Haeggstrom Edward O.,Ergun A. Sanli,Cheng Ching-Hsiang,Khuri-Yakub Butrus T.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Cited by 49 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-Performance Electrode-Post CMUTs: Fabrication Details and Best Practices;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

2. Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers;Microsystems & Nanoengineering;2023-02-23

3. Giant Pressure Output Efficiency of Capacitive Micromachined Ultrasonic Transducers Using Nano-Silicon-Springs;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

4. Ultra-Low-Voltage High-Efficiency CMUTs with Piston-Structured Plates for Fill Level Sensing;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

5. A Handheld Imaging Probe for Acoustic Angiography With an Ultrawideband Capacitive Micromachined Ultrasonic Transducer (CMUT) Array;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2022-07
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