An In-Run Automatic Mode-Matching Method With Amplitude Correction and Phase Compensation for MEMS Disk Resonator Gyroscope
Author:
Affiliation:
1. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China
Funder
National Natural Science Foundation of China
Foundation of Equipment Pre-research Area
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/19/10012124/10220196.pdf?arnumber=10220196
Reference26 articles.
1. A dynamically mode-matched piezoelectrically transduced high-frequency flexural disk gyroscope
2. A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range
3. Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators
4. Design and Verification of a Structure for Isolating Packaging Stress in SOI MEMS Devices
5. An In-Run Automatic Mode-Matching Method for N = 3 MEMS Disk Resonator Gyroscope
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1. Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II;Micromachines;2024-05-21
2. A Quality Factor Matching Method for MEMS Disk Resonator Gyroscope in Rate Mode;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02
3. A Low-Complexity In-Run Modal Frequency Tuning Method for MEMS Disk Gyroscopes Without Gain Calibration and Phase Shifting;IEEE Transactions on Instrumentation and Measurement;2024
4. Modeling, Characterization, and Compensation of Detection and Actuation Coupling Errors for Whole-Angle Micro Hemispherical Resonant Gyroscope;IEEE Transactions on Instrumentation and Measurement;2024
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