Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm-Reference-Cited by-同舟云学术

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Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm

Published:2024 Issue: Volume:73 Page:1-10
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Xu Peng¹^ORCID,Li Rui-Jun¹^ORCID,Shen Yi¹^ORCID,Lin Rong-Wei¹^ORCID,Yao Pan¹^ORCID,Cheng Zhen-Ying¹^ORCID,Zhang Lian-Sheng¹^ORCID,Huang Qiang-Xian¹^ORCID,Cheng Fang²^ORCID

Affiliation:

1. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, China

2. School of Mechanical and Aerospace Engineering, Nanyang Technological University, Jurong West, Singapore

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/19/10367905/10384617.pdf?arnumber=10384617

Reference42 articles.

1. Micro Aspheric Convex Lenses Fabricated by Precise Scraping

2. Comparison of EUV Photomask Metrology Between CD-AFM and TEM

3. Characteristics of micro-hole formation during fibre laser drilling of aerospace superalloy

4. Spatial dimensions in atomic force microscopy: Instruments, effects, and measurements

5. Atomic‐Scale Manipulation and In Situ Characterization with Scanning Tunneling Microscopy

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