Monitoring of Graphene Properties in the Process of Viral Biosensor Manufacturing

Author:

Lebedev Alexander A.1,Shmidt Natalia M.2,Shabunina Evgeniya I.2,Nashchekin Alexey V.2,Gushchina Ekaterina V.2,Petrov Vasiliy N.2,Eliseev Ilya A.2,Lebedev Sergey P.2,Priobrazhenskii Sergei Iu.2,Roenkov Alexander D.3,Tanklevskaya Elena M.2,Puzyk Mikhail V.4,Usikov Alexander S.3,Klotchenko Sergey A.5,Vasin Andrey V.5,Plehanov Anton Yu.5,Golyashow Vladimir A.1,Tereshchenko Oleg Evgenievich1

Affiliation:

1. Russian Academy of Sciences

2. Ioffe Institute

3. Nitride Crystals Group

4. Herzen State Pedagogical University of Russia

5. Smorodintsev Research Institute of Influenza

Abstract

The properties of graphene chips with low reproducibility (LR) after photolithography (PLG) and graphene functionalization have been studied. It is shown that the introduction of additional cleaning after PLG can significantly increase the reproducibility of the parameters of processed graphene in biosensors. The use of dilute PBS solutions for virus detection makes it possible to increase the relative concentration sensitivity of biosensors by several times.

Publisher

Trans Tech Publications, Ltd.

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