Structure and Properties of TiBCN Coatings Synthesized Using Unbalanced Magnetron Sputtering

Abstract

TiBCN coatings were prepared by magnetron sputtering installed with two kinds of target materials (Ti and TiB2) in a mixed Ar, N2 and C2H2 ambient. The results showed that the TiBCN coatings could be successfully obtained by reactive sputtering with Ti and TiB2 dual targets. Raman spectroscopy indicated that TiBCN had similar spectra with DLC, which confirmed with high C content, in the wave range of 1000 ~ 2000 cm-1. The hardness of the coatings would decrease with an increase of N and the sp3 bond in the coatings. The friction coefficient against soda-lime glass ball was decreased from 1.3 of blank WC-Co substrate to 0.35 of the coatings in dry sliding condition.