Formation of Fe2Si Wetting Coating on Si(001) 2×1 and Growth of a Stable Fe Nanolayer: AES and EELS Study

Abstract

The structural-phase state of two-dimensional (d = 1 - 3 ML) coatings before and after annealing and that of Fe nanolayers (d = 4 - 10 ML) were investigated on Si (001)2×1 by electron spectroscopy methods of Auger-electrons and energy losses. The room (30 °С) and lowed (≤ 1250 °С) temperatures of the Si (001) substrate and Fe vapor, respectively, were used during Fe deposition. This study showed the following. An ordered two-dimensional 1×1 phase of Fe stable up to 600 °C and then a Fe2Si wetting coating stable at 250 °C form near the thickness 1 ML and 3 ML, respectively. Fe deposition on this Fe2Si coating leads to the one-after-another formation of the Fe3Si, the Si-in-Fe solution, and then a stable up to 250 °C Fe nanofilm with segregated Si.