Enhancing responsivity and detection limit in tunable nano-electromechanical system resonator mass sensors

Abstract

Abstract This research explores the enhancement of the resonator-based mass-sensor sensing performance through tunable nanomechanical resonators, focusing on ways to improve and control the responsivity and detection limit during the operational stage. Two different tuning mechanisms are studied, namely electrostatic tuning induced by gate voltage and tuning by temperature change. The results indicate that tuning the resonance frequency and nonlinearity by gate voltage in ultrathin resonators significantly improves the sensor’s responsivity (up to ∼ 20 times) and detection limit (from the scale of zeptograms to yoctograms). The impact of temperature changes on these parameters reveals an alternative method for tuning the sensing performance. While both tuning methods effectively enhance the sensing capabilities, electrostatic tuning exhibits a more pronounced impact, with the extent of improvement significantly influenced by the resonator’s dimensions. This work proposes a practical approach to real-time optimization of resonator mass sensors, with promising applications in fields like environmental monitoring and medical diagnostics.