Moisture Permeation through Ultrathin TiO$_{2}$ Films Grown by Atomic Layer Deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/5/i=3/a=035701/pdf
Reference14 articles.
1. Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers
2. The origin of low water vapor transmission rates through Al2O3/ZrO2 nanolaminate gas-diffusion barriers grown by atomic layer deposition
3. Gas diffusion barriers on polymers using Al2O3 atomic layer deposition
4. Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition
5. Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers
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