Manipulation of Polymer Solubility: Crosslinking, Thermal Activation and Variable-Temperature Bakes
Author:
Affiliation:
1. State University of New York Polytechnic Institute
Publisher
Technical Association of Photopolymers, Japan
Link
https://www.jstage.jst.go.jp/article/photopolymer/36/5/36_337/_pdf
Reference19 articles.
1. [1] Willson, C. G., Ito, H., Fréchet, J. M. J., Tessier, T. G. and Houlihan, F. M., “Approaches to the Design of Radiation‐Sensitive Polymeric Imaging Systems with Improved Sensitivity and Resolution,” J. Electrochem. Soc. 133(1), 181-187 (1986).
2. [2] Peng, R. C., Huang, I. H., Liu, H. H., Lee, H. J., Lin, J., Lin, A., Chang, A., Lin, B. S.-M. and Lalovic, I., “Process requirements for pitch splitting LELE double patterning at advanced logic technology node,” Opt. Microlithogr. XXV 8326(March), 83260X (2012).
3. [3] Hattori, T., Yokoyama, Y., Kimura, K., Yamanaka, R., Tanaka, T. and Fukuda, H., “Development of high-performance negative-tone resists for 193-nm lithography,” J. Photopolym. Sci. Technol. 16(4), 489-498 (2003).
4. [4] Ito, H. and Willson, C. G., “Chemical amplification in the design of dry developing resist materials,” Polym. Eng. Sci. 23(18), 1012-1018 (1983).
5. [5] Ito, H. and Ueda, M., “Thermolysis and Photochemical Acidolysis of Selected Polymethacrylates,” Macromolecules 21(5), 1475-1482 (1988).
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