Suppressing The Blistering of Silicon Nitride in PERC Solar Cells for High Industrial Yield

Abstract

Passivated emitter and rear contact (PERC) solar cells possess the highest photovoltaic market share at present. In industrial production, blistering of the rear silicon nitride (SiNx) passivation layer significantly affects the yield. In order to solve this problem, the relevant processes for manufacturing the PERC solar cells have been carefully studied. It was found that polishing of the silicon wafer rear surface, aluminum (AlOx) thickness, and the deposition process of the SiNx layer will affect the blistering ratio. By optimizing the manufacturing process mentioned above, the blistering ratio of the PERC solar cells has been effectively suppressed. This work not only provides reliable technical support for the yield improvement of the PERC solar cells but also provides some useful reference for the tunnel oxide passivated contact (TOPcon) and back contact (BC) solar cell industrial manufacture.