Affiliation:
1. Research Triangle Institute, Center for Aerosol Technology, Research Triangle Park, North Carolina 27709
2. Microelectronics Center of North Carolina, Research Triangle Park, North Carolina 27709
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
11 articles.
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3. Protection of extreme ultraviolet lithography masks. I. Thermophoretic protection factors at low pressure for diffusing nanoscale particles;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-05
4. Corrosion Engineering of Electronic and Photonic Devices;Materials Science and Technology;2013-02-15
5. Contamination Monitoring;Microelectronics Manufacturing Diagnostics Handbook;1993