Large-Scale Preparation of Uniform Nanopatterned Silicon Substrates by Inductively Coupled Plasma Etching Using Self-Assembled Anodic Alumina Masks
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Silicon nanowires-based highly-efficient SERS-active platform for ultrasensitive DNA detection
2. Nanowire sensor response to reactive gas environment
3. Optoelectronic applications of porous polycrystalline silicon
4. Electrically driven lasing in light-emitting devices composed of n-ZnO and p-Si nanowires
5. InGaN-based light-emitting diodes grown and fabricated on nanopatterned Si substrates
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1. Controllable Fabrication of Silicon Nanopore Arrays by Two-Step Inductively Coupled Plasma Etching Using Self-Assembled Anodic Aluminum Oxide Mask;ECS Journal of Solid State Science and Technology;2023-06-01
2. Understanding the thermal conductivity variations in nanoporous anodic aluminum oxide;Nanoscale Advances;2020
3. Nanopore diameter-dependent properties of thin three-dimensional ZnO layers deposited onto nanoporous silicon substrates;Ceramics International;2017-04
4. Fabrication of nanopore and nanoparticle arrays with high aspect ratio AAO masks;Nanotechnology;2017-01-30
5. Three-dimensional deposition of ZnO thin layer on nanopatterned silicon substrate;Materials Letters;2016-10
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