Editors' Choice—Efficiency of a CMP Pad at Removing Protective Material from Copper during CMP

Author:

Choi Seungchoun,Doyle Fiona M.,Dornfeld David A.

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference36 articles.

1. Tripathi Shantanu . 2008, Tribo-chemical mechanisms of copper chemical mechanical planarization (CMP) - Fundamental investigations and integrated modeling. Ph.D. Thesis University of California, Berkeley. Ann Arbor: ProQuest/UMI. (Publication No. 3353284.)

2. Integrated Tribo-Chemical Modeling of Copper CMP

3. Copper CMP Modeling: Millisecond Scale Adsorption Kinetics of BTA in Glycine-Containing Solutions at pH 4

4. A Model of Material Removal and Post Process Surface Topography for Copper CMP

5. Choi S. . 2013, Physicochemical Modeling of Copper Chemical Mechanical Planarization (CMP) Considering Synergies in Removal Materials. PhD thesis, University of California, Berkeley. Ann Arbor: ProQuest/UMI. (Publication No. 3616430.)

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