Author:
Feldman Charles,Satkiewicz Frank G.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
25 articles.
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1. Anomalously high yield of doubly charged Si ions sputtered from cleaned Si surface by keV neutral Ar impact;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-08
2. References;Thin Films by Chemical Vapour Deposition;1990
3. The emission of neutral clusters in sputtering;Applied Physics A Solids and Surfaces;1989-03
4. Formation mechanism of evaporated a-SiO2: An approach from the oxidation processes of a-Si;Applied Surface Science;1988-09
5. Angular dependence of secondary ion emission from silicon bombarded with inert gas ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1984-03