Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation-Reference-Cited by-同舟云学术

Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation

Published:1986-06-01 Issue:6 Volume:133 Page:1253-1256
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Irene Eugene A.¹²³,Massoud H. Z.¹²³,Tierney E.¹²³

Affiliation:

1. Department of Chemistry, University of North Carolina, Chapel Hill, North Carolina 27514

2. Department of Electrical Engineering, Duke University, Durham, North Carolina 27706

3. IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2108829/pdf

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