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UV-LED exposure system for low-cost photolithography

  • Published:2014-03-31 Issue: Volume: Page:
  • ISSN:0277-786X
  • Container-title:SPIE Proceedings
  • language:
  • Short-container-title:

Author:

Yapici Murat Kaya,Farhat Ilyas

Publisher

SPIE

Reference23 articles.

1. Fundamentals of Microfabrication: The Science of Miniaturization;Madou,2011

2. Handbook of Microlithography, Micromachining, and Microfabrication;Levinson,1997

3. X-ray lithography, where it is now, and where it is going

4. Lithography and Other Patterning Techniques for Future Electronics;Pease,2008

5. Imprint of sub‐25 nm vias and trenches in polymers

Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of Programmable UV-LED Microlithography System for 3D Microfabrication;Journal of Microelectromechanical Systems;2022-02

2. Accessible, large-area, uniform dose photolithography using a moving light source;Journal of Micromechanics and Microengineering;2021-12-20

3. Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser;Journal of Vacuum Science & Technology B;2021-12

4. Scanning digital oil immersion lithography providing high-speed large area patterning with diffraction limited sub-micron resolution;Journal of Micromechanics and Microengineering;2020-11-10

5. UV-LED Lithography System and Characterization;2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS);2020-09-27
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