Suppression of scanning nonlinearities through computational self-correction in optical profilometry-Reference-Cited by-同舟云学术

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Suppression of scanning nonlinearities through computational self-correction in optical profilometry

Published:2024-06-18 Issue: Volume:32 Page:16
ISSN:
Container-title:Optics and Photonics for Advanced Dimensional Metrology III
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Author:

Zhukova Lena,Artigas Roger,Carles Guillem

Publisher

SPIE

Reference6 articles.

1. Metrological characteristics for the calibration of surface topography measuring instruments: a review;Leach;Meas Sci Technol,2020

2. Optical Measurement of Surface Topography

3. Challenges in white-light phase-shifting interferometry;Schmit,2002

4. White light phase-shifting interferometry with self-compensation of PZT scanning errors;Kim,1999

5. Computational self-correction of scanning nonlinearities in optical profilometry;Zhukova,2023

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