Author:
Schmidt Andreas,Ehrfeld Wolfgang,Feiertag Gregor,Luettge Regina,Schmidt Martin
Cited by
5 articles.
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1. Mask technologies for deep x-ray LIGA;19th European Conference on Mask Technology for Integrated Circuits and Microcomponents;2003-06-02
2. Plastic micro-optical components with the LIGA technology;Micromachining Technology for Micro-Optics and Nano-Optics;2003-01-25
3. Manufacturing Aspects of LIGA Technologies;Journal of Photopolymer Science and Technology;2003
4. High-precision mask fabrication for deep-x-ray lithography;SPIE Proceedings;2000-02-03
5. Recent developments in deep x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-11