Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced ultrahigh numerical aperture lithography
-
Published:2011-07-01
Issue:
Volume:
Page:
-
ISSN:1932-5150
-
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
-
language:
-
Short-container-title:
您需要登录后可以查看相关数据！