Design and performance of capping layers for EUV multilayer mirrors-Reference-Cited by-同舟云学术

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Design and performance of capping layers for EUV multilayer mirrors

Published:2003-06-13 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Bajt Sasa,Chapman Henry N.,Nguyen Nhan,Alameda Jennifer B.,Robinson Jeffrey C.,Malinowski Michael E.,Gullikson Eric,Aquila Andy,Tarrio Charles,Grantham Steven

Publisher

SPIE

Cited by 41 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Influence of Impurity Atoms on Hydrogen Diffusion into Ruthenium;The Journal of Physical Chemistry C;2022-11-10

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4. 极紫外光刻光源的研究进展及发展趋势;Laser & Optoelectronics Progress;2022

5. Tin deposition on ruthenium and its influence on blistering in multi-layer mirrors;Physical Chemistry Chemical Physics;2021

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