Research on the calibration method of reference flat based on gravity deformation-Reference-Cited by-同舟云学术

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Research on the calibration method of reference flat based on gravity deformation

Published:2018-07-24 Issue: Volume: Page:
ISSN:
Container-title:Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
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Author:

Zhao Siwei,Zhu Xueliang,Tian Ailin,Zhao Huiying,Liu Bingcai,Wang Hongjun

Publisher

SPIE

Reference10 articles.

1. Three-flat test with plates in horizontal posture

2. Johannes Soons. Three-flat tests including mounting induced deformations[J];Ulf,2007

3. Evaluation of the deformation value of an optical flat under gravity[J];Yohan,2014

4. Pseudo-Shear Interferometry[J];Keenan,1983

5. Absolute surface figure testing by shift-rotation method using Zernike polynomials

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Active-compensation of systematic error for the 1000 mm aperture flat interferometer;Optics Express;2024-06-20

2. Absolute measurement for a 300-mm-aperture vertical interferometer based on compensation of gravity-induced deformation;Optics Communications;2021-08

3. Iterative deformation calibration of a transmission flat via the ring-point support on a 300-mm-aperture vertical Fizeau interferometer;Optics Express;2021-01-19

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