Al2O3−BaTiO3 nanolaminates fabricated by multistationary target pulsed laser deposition with in situ ellipsometry-Reference-Cited by-同舟云学术

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Al2O3−BaTiO3 nanolaminates fabricated by multistationary target pulsed laser deposition with in situ ellipsometry

Published:2017-04-20 Issue:4 Volume:11 Page:043506
ISSN:1934-2608
Container-title:Journal of Nanophotonics
language:en
Short-container-title:J. Nanophoton

Author:

Jones John G.¹,Boeckl John J.¹,Smith Steven R.²,Landis Gerald R.²,Murphy Neil R.¹,Hu Zhongqiang³,Bowers Cynthia T.⁴,Stutz Charles E.¹

Affiliation:

1. Air Force Research Laboratory, Wright-Patterson Air Force Base, Ohio, United States

2. University of Dayton Research Institute, Dayton, Ohio, United States

3. Universal Technology Corporation, Dayton, Ohio, United States

4. Wright State University, Mechanical and Materials Engineering, Dayton, Ohio, United States

Publisher

SPIE-Intl Soc Optical Eng

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. A review on hybrid nanolaminate materials synthesized by deposition techniques for energy storage applications

2. Tailoring dielectric relaxation in ultra-thin high-dielectric constant nanolaminates for nanoelectronics

3. Controllable giant dielectric constant in AlOx/TiOynanolaminates

4. Giant dielectric constant in TiO2/Al2O3nanolaminates grown on doped silicon substrate by pulsed laser deposition

5. Hybrid titanium–aluminum oxide layer as alternative high-k gate dielectric for the next generation of complementary metal–oxide–semiconductor devices

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