Melting phenomena and pulsed‐laser annealing in semiconductors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.328685
Reference23 articles.
1. A comparative study of laser and thermal annealing of boron‐implanted silicon
2. Depth of melting produced by pulsed‐laser irradiation
3. Depth of melting produced by pulsed‐laser irradiation
4. Laser Annealing of Ion-Implanted Semiconductors
5. Redistribution of dopants in ion‐implanted silicon by pulsed‐laser annealing
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