Nanolithography of chemically prepared Si with a scanning tunneling microscope
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105994
Reference6 articles.
1. Direct writing of 10 nm features with the scanning tunneling microscope
2. Modification of hydrogen‐passivated silicon by a scanning tunneling microscope operating in air
3. Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE
4. Effect of organic contaminants on the oxidation kinetics of silicon at room temperature
5. Gold deposition from a scanning tunneling microscope tip
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