Ultraviolet‐light irradiation of a radio‐frequency plasma applied to fluoropolymer sputtering deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341611
Reference22 articles.
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1. Gas-sorption effects on plasma polymer films characterized by XPS and quartz crystal resonator;Polymer;2000-01
2. Detection of petroleum hydrocarbons at low ppb levels using quartz resonator sensors and instrumentation of a smart environmental monitoring system;Journal of Environmental Monitoring;1999
3. Fluoropolymer films produced by sputtering using inductively coupled plasma ion source and their organic vapor sorption characteristics;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-11
4. Similarity of Plasma-Polymerized Tetrafluoroethylene and Fluoropolymer Films Deposited by rf Sputtering of Poly(tetrafluoroethylene);Langmuir;1998-03-26
5. Structures and vapor-sorption characteristics of sputtered polychlorotrifluoroethylene films treated by hydrogen-plasma;Thin Solid Films;1997-11
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