Two-photon optical beam induced current imaging through the backside of integrated circuits
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119334
Reference8 articles.
1. Optical Beam Induced Current Techniques for Failure Analysis of Very Large Scale Integrated Circuits Devices
2. Electron and optical beam testing of integrated circuits using CIVA, LIVA, and LECIVA
3. Applications of an infrared laser scan microscope in device testing
4. Indirect Two-Photon Transitions in Si at 1.06 μm
5. Two-Photon Laser Scanning Fluorescence Microscopy
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