Laser-assisted local metal–organic vapor phase epitaxy

Abstract

Selective area epitaxial growth is an important technique, both for monolithic device integration as well as for defect reduction in heteroepitaxy of crystalline materials on foreign substrates. While surface engineering with masking materials or by surface structuring is an effective means for controlling the location of material growth, as well as for improving crystalline properties of epitaxial layers, the commonly involved integral substrate heating presents a limitation, e.g., due to constraints ofr the thermal budget applicable to existing device structures. As a solution, an epitaxial growth approach using a laser source only locally heating the selected growth area, in combination with metal–organic precursors to feed a pyrolithic chemical reaction (also known as metal–organic vapor phase epitaxy, MOVPE), is presented. Without masking or surface structuring, local epitaxial growth of III–V compound semiconductor layers on a 50–1500 µm length-scale, with high structural and optical quality, is demonstrated. We discuss general design rules for reactor chamber, laser heating, temperature measurement, sample manipulation, gas mixing, and distinguish laser-assisted local MOVPE from conventional planar growth for the important compound semiconductor GaAs. Surface de-oxidation prior to growth is mandatory to realize smooth island surfaces. Linear growth rates in the range 0.5–9 µm/h are demonstrated. With increasing island diameter, the probability for plastic deformation within the island increases, depending on reactor pressure. A step-flow mode on the island surface can be achieved by establishing a sufficiently small temperature gradient across the island.