Development and control of a hybrid active mount module for precision stages
Author:
Affiliation:
1. School of Mechatronics Engineering, Korea Polytechnic University, Siheung-si 15073, South Korea
2. Manufacturing System R&D Group, Korea Institute of Industrial Technology, Cheonan-si 31056, South Korea
Funder
Korea Institute for Advancement of Technology
Korea Institute of Industrial Technology
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5122806
Reference7 articles.
1. Fuzzy adaptive multi-mode sliding mode control for precision linear stage based on floating stator
2. Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges
3. High-Precision Motion Control Techniques: A Promising Approach to Improving Motion Performance
4. Ultra-low-frequency vertical vibration isolator based on a two-stage beam structure for absolute gravimetry
5. Semi-active reaction force compensation for a linear motor motion stage
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