Design, optimization, and characterization of an XY nanopositioning stage with multi-level spatial flexure hinges for high-precision large-stroke motion guidance

Abstract

Establishing a novel design and accurate analytical models for XY nanopositioning stages based on voice coil motor (VCM) actuators is critical to achieving an optimal working performance. To overcome the existing design challenges of 2-degree-of-freedom guiding mechanisms, a four-layer structure composed of L-shaped spatial double parallelogram flexure mechanisms was proposed for the magnetic stage, which exhibits light weight and inhibits parasitic and decoupled motions. The guiding mechanisms were modeled by the compliance matrix method. Thereafter, by combining an electromagnetic model for the VCMs with the equivalent magnetic network method, an electromagnetic–mechanical coupling optimization method with multiple constraints was proposed for the stage to achieve a millimeter-range motion with a maximized natural frequency. The mechanical and electromagnetic performances were then verified by finite element analysis software. The optimized prototype was tested with a stroke of ±3.41 and ±3.08 mm for X axis and Y axis, respectively, a closed-loop resolution of 100 nm for X axis and 150 nm for Y axis, and a resonant frequency of 11.75 Hz for both axes. The tracking of a 0.1 Hz spiral of Archimedes achieved a maximum tracking error of 2.9%.