Stresses in Pt/Pb(Zr,Ti)O3/Pt thin‐film stacks for integrated ferroelectric capacitors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360230
Reference18 articles.
1. Piezoelectric ceramics: Characteristics and applications
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4. Stress Sensitivity of Piezoelectric Ceramics: Part 3. Sensitivity to Compressive Stress Perpendicular to the Polar Axis
5. Stress-related effects in thin films
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