Growth of silicon bump induced by swift heavy ion at the silicon oxide-silicon interface
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2166476
Reference16 articles.
1. Effect of high electronic energy deposition in semiconductors
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4. Track formation inSiO2quartz and the thermal-spike mechanism
5. Swift heavy ions in magnetic insulators: A damage-cross-section velocity effect
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