Self-sputtering runaway in high power impulse magnetron sputtering: The role of secondary electrons and multiply charged metal ions
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2936307
Reference17 articles.
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5. 49th Annual Technical Conference Proceedings, Society of Vacuum Coaters;Chistyakov R.,2006
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