Mechanical property measurement of thin polymeric-low dielectric-constant films using bulge testing method
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.126237
Reference10 articles.
1. The bulge test: A comparison of the theory and experiment for isotropic and anisotropic films
2. A technique for the determination of stress in thin films
3. A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films
4. Fracture strength and biaxial modulus measurement of plasma silicon nitride films
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