Synchrotron radiation-induced surface-conductivity of SiO2 for modification of plasma charging
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.126330
Reference7 articles.
1. The effects of processing on radiation damage in SiO2
2. Radiation Damage in SiO2/Si Induced by VUV Photons
3. Plasma vacuum ultraviolet emission in an electron cyclotron resonance etcher
4. Radiation Damage to Thermal Silicon Dioxide Films in Radio Frequency and Microwave Downstream Photoresist Stripping Systems
5. In Situ Monitoring of Radiation Damage to Thermal Silicon Dioxide Films Exposed to Downstream Oxygen Plasmas
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