Fabrication of nanostructures with long-range order using block copolymer lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1519356
Reference23 articles.
1. Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter
2. Micellar Inorganic-Polymer Hybrid Systems—A Tool for Nanolithography
3. Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
4. Large area dense nanoscale patterning of arbitrary surfaces
5. Fabrication of regularly arranged nanocolumns on diamond(100) using micellar masks
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