A laser interferometer for measuring straightness and its position based on heterodyne interferometry
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3266966
Reference12 articles.
1. A straightness error measurement method matched new generation GPS
2. Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage
3. A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques
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