The atomic hydrogen flux to silicon growth flux ratio during microcrystalline silicon solar cell deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2987519
Reference21 articles.
1. Intrinsic microcrystalline silicon: A new material for photovoltaics
2. Hidden parameters in the plasma deposition of microcrystalline silicon solar cells
3. Deposition of microcrystalline silicon prepared by hot-wire chemical-vapor deposition: The influence of the deposition parameters on the material properties and solar cell performance
4. Characterization of grain growth, nature and role of grain boundaries in microcrystalline silicon—review of typical features
5. Microcrystalline silicon growth on a-Si:H: effects of hydrogen
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