Comparative experimental analysis of the a-C:H deposition processes using CH4 and C2H2 as precursors-Reference-Cited by-同舟云学术

Comparative experimental analysis of the a-C:H deposition processes using CH4 and C2H2 as precursors

Published:2007-09 Issue:5 Volume:102 Page:053304
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Peter S.,Graupner K.,Grambole D.,Richter F.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2777643

Reference61 articles.

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