Expanded beam deflection method for simultaneous measurement of displacement and vibrations of multiple microcantilevers
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3652977
Reference13 articles.
1. Novel optical approach to atomic force microscopy
2. A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences
3. Cantilever transducers as a platform for chemical and biological sensors
4. A detailed analysis of the optical beam deflection technique for use in atomic force microscopy
5. A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors
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