A monolithic linear motion platform driven by a piezoelectric and fluidic pressure-fed dual mechanism-Reference-Cited by-同舟云学术

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A monolithic linear motion platform driven by a piezoelectric and fluidic pressure-fed dual mechanism

Published:2021-10-01 Issue:10 Volume:92 Page:105002
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Chun Heebum¹,Kim Jungsub¹^ORCID,Lee ChaBum¹^ORCID,Kim Hyo-Young²³

Affiliation:

1. J. Mike Walker 66’ Department of Mechanical Engineering, Texas A&M University 3123 TAMU, College Station, Texas 77843, USA

2. Korea Institute of Industrial Technology, 89 Yangdaegiro-gil, Ipjang-myeon, Seobuk-gu, Cheonan-si, Chungnam-do 31056, South Korea

3. Department of Mechatronics Engineering, Korea Polytechnic University, Sangidaehak-ro, Siheung-si, Gyeonggi-do 429793, South Korea

Funder

Korea Institute of Industrial Technology

Publisher

AIP Publishing

Subject

Instrumentation

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0056955

Reference33 articles.

1. Millipede-a MEMS-based scanning-probe data-storage system

2. Advances in AFM for the electrical characterization of semiconductors

3. High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes

4. The CD-ROM Drive

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