Etching polymer films with ultraviolet laser pulses of long (10–400 μs) duration
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351685
Reference10 articles.
1. Ultraviolet laser ablation of organic polymers
2. Femtosecond uv excimer laser ablation
3. Effect of optical pulse duration on the XeCl laser ablation of polymers and biological tissue
4. Etching polyimide films with continuous‐wave ultraviolet lasers
5. Photokinetic etching of polymethyl methacrylate films by continuous wave ultraviolet laser radiation
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