Lower limits of line resistance in nanocrystalline back end of line Cu interconnects
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4967196
Reference15 articles.
1. Full band calculations of the intrinsic lower limit of contact resistivity
2. Effect of realistic metal electronic structure on the lower limit of contact resistivity of epitaxial metal-semiconductor contacts
3. Quantum Transport: Atom to Transistor
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