Three-dimensional printed microcantilever with mechanical metamaterial for fiber-optic microforce sensing

Author:

Wang Famei12ORCID,Zou Mengqiang12ORCID,Liao Changrui12ORCID,Li Bozhe12,Liu Dejun12ORCID,Zhou Jie12,Huang Haoqiang12ORCID,Zhao Jinlai3ORCID,Liu Chao4,Chu Paul K.5ORCID,Wang Yiping12

Affiliation:

1. Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University 1 , Shenzhen 518060, China

2. Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University 2 , Shenzhen 518060, China

3. College of Materials Science and Engineering, Shenzhen Key Laboratory of Polymer Science and Technology, Guangdong Research Center for Interfacial Engineering of Functional Materials 3 , Shenzhen 518060, China

4. School of Electronics Science, Northeast Petroleum University 4 , Daqing 163318, China

5. Department of Physics, Department of Materials Science and Engineering, and Department of Biomedical Engineering, City University of Hong Kong 5 , Tat Chee Avenue, Kowloon, Hong Kong, China

Abstract

Mechanical metamaterials can adjust mechanical properties of structures flexibly through a mechanical structural design based on the premise that the materials remain unchanged. Here, a cantilever probe microstructure is designed using mechanical metamaterials for an optical fiber microforce sensor tip that can be prepared by femtosecond laser-induced two-photon polymerization. The elastic constant k of the fabricated fiber-optic microforce sensor has been adjusted by two orders of magnitude from 0.165 to 46 N/m, and the geometric configuration of the cantilever beam can be tailored to match the mechanical properties of biological specimens. This fiber microforce sensor shows an ultra-high force sensitivity of 154 nm/µN and a force resolution of up to 130 pN. The optical fiber microforce sensor that shows the lowest force resolution in a direct-contact mode has high potential for biosensing applications, and the results reveal a potential design strategy for special scanning tunneling microscope probes with unique physical properties.

Funder

National Natural Science Foundation of China

National Natural Science Foundation of China-Guangdong Joint Fund

China Postdoctoral Science Foundation

Shenzhen Science and Technology Innovation Program

Publisher

AIP Publishing

Subject

Computer Networks and Communications,Atomic and Molecular Physics, and Optics

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